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Oriented growth of 5-inch optical polycrystalline diamond films by suppressing dark features
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| 【文章作者】Chan, Siyi;Tu, Juping;Huang, Ke;Yang, Zhiliang;Liu, Peng;Zheng, Liping;Liu, Jinlong;Chen, Liangxian;Wei, Junjun;Li, Chengming |
| 【文章摘要】 Optical diamond materials are essential for infrared optical windows, microwave windows, and laser windows due to their exceptional properties. However, dark features inside the diamond are significant factors limiting optical properties, particularly at high deposition rates. This work focuses on adjusting crystallographic parameters to prepare (110) oriented optical-grade polycrystalline diamond films, aiming to mitigate dark features. Diamond films deposited via microwave plasma chemical vapor deposition (MPCVD) exhibit discernible quality stratification. Characterization analysis of diamond film samples with varying levels of black defects reveals a correlation: films with higher dark feature content tend to exhibit a preference for the (111) orientation, accompanied by a significant presence of penetration twins and interstitial voids. Conversely, transparent diamond films demonstrate a prominent (110) orientation, featuring numerous contact twins that alleviate competition from penetration twins and original grains during growth. Electron backscatter diffraction (EBSD) and scanning electron microscope (SEM) results reveal that transparent diamond films cultivated with a pronounced preference for the (110) orientation manifest consistent and seamless contact twins, leading to fewer dark features and improved optical transmittance. In contrast, (111) oriented diamond film exhibits numerous penetration twins, and holes form between them. Based on the analysis, 5-inch optical polycrystalline diamond films with (110) orientation were achieved successfully by suppressing dark features. |
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【卷】【ISSUE】【ISSUEID】
【文章期份】2024
【发布日期】2025/5/13 10:04:17
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